Advanced growth techniques and challenges in ferroelectric AlScN thin films for next-generation electronic devices
Xiaoxi Li, Yuan Fang, Yuchun Li, Zhifan Wu, Shuqi Huang, Yingguo Yang, Bitao Dong, Gengsheng Chen, Yue Hao, Genquan Han
Moore and More
.
2025, (4): 395
-409
.
DOI: 10.1007/s44275-024-00021-0
