Accurate and efficient evaluation of the ionization potentials of extreme ultraviolet photoresists using density functionals and semi-empirical methods

Kun Du, Jiafeng Ying, Lixin Han, Jie Xue, Hanshen Xin, Jianhua Zhang, Haoyuan Li

Moore and More . 2025, (2): 102 -113 . DOI: 10.1007/s44275-024-00002-3