Accurate and efficient evaluation of the ionization potentials of extreme ultraviolet photoresists using density functionals and semi-empirical methods
Kun Du, Jiafeng Ying, Lixin Han, Jie Xue, Hanshen Xin, Jianhua Zhang, Haoyuan Li
Accurate and efficient evaluation of the ionization potentials of extreme ultraviolet photoresists using density functionals and semi-empirical methods
Kun Du, Jiafeng Ying, Lixin Han, Jie Xue, Hanshen Xin, Jianhua Zhang, Haoyuan Li
Moore and More
.
2025, (2): 102
-113
.
DOI: 10.1007/s44275-024-00002-3
