Advanced growth techniques and challenges in ferroelectric AlScN thin films for next-generation electronic devices
Xiaoxi Li, Yuan Fang, Yuchun Li, Zhifan Wu, Shuqi Huang, Yingguo Yang, Bitao Dong, Gengsheng Chen, Yue Hao, Genquan Han
Advanced growth techniques and challenges in ferroelectric AlScN thin films for next-generation electronic devices
Xiaoxi Li, Yuan Fang, Yuchun Li, Zhifan Wu, Shuqi Huang, Yingguo Yang, Bitao Dong, Gengsheng Chen, Yue Hao, Genquan Han
Moore and More
.
2025, (4): 395
-409
.
DOI: 10.1007/s44275-024-00021-0
